The design and implementation of a neutralized ion beam sputtering system for the deposition of La₀₈̣₁₅Sr₀₁̣₈₅MnO₃ magnetoresistive thin films

Author

Roman Shaparenko

Publication Date

2001

Document Type

Dissertation/Thesis

Degree Name

M.S. (Master of Science)

Legacy Department

Department of Electrical Engineering

LCSH

Ion bombardment; Neutral beams; Magnetoresistance; Thin films

Comments

Includes bibliographical references (pages [67]-70)

Recommended Citation

Shaparenko, Roman, "The design and implementation of a neutralized ion beam sputtering system for the deposition of La₀₈̣₁₅Sr₀₁̣₈₅MnO₃ magnetoresistive thin films" (2001). Graduate Research Theses & Dissertations. 5404.
https://huskiecommons.lib.niu.edu/allgraduate-thesesdissertations/5404

Extent

ix, 70 pages

Language

eng

Publisher

Northern Illinois University

Rights Statement

In Copyright

Rights Statement 2

NIU theses are protected by copyright. They may be viewed from Huskie Commons for any purpose, but reproduction or distribution in any format is prohibited without the written permission of the authors.

Media Type

Text