Shaffer, John C., 1938-2017
M.S. (Master of Science)
Department of Physics
Glow discharges; Ultrahigh vacuum; Microwaves
High temperature baking and glow discharge surface conditioning have been widely accepted as techniques to obtain ultra high vacuum in a wide variety of applications. For high energy particle accelerators, however, low frequency and DC glow discharge methods can only be used as precleaning processes before device installation and in-situ baking systems are very expensive. This thesis addresses the use of microwave frequency electromagnetic radiation to power a glow discharge in a technique that has in- situ utility for accelerator beamtubes. Parts from a household microwave oven are used as a low cost power source to drive an argon plasma for the purpose of surface contaminant desorption by electron and ion bombardment. The theoretical justification for the concept is introduced. Next, the design and fabrication of a working system are described in detail and the results of its use are presented. Particularly relevant results include the demonstration of the evolution of specific contaminant species and the control of the location of the plasma.
Stoller, Dennis F., "A novel microwave electron cyclotron resonance glow discharge vacuum conditioning system" (1995). Graduate Research Theses & Dissertations. 447.
Northern Illinois University
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