Rashmi Asalla

Publication Date


Document Type


First Advisor

Korampally, Venumadhav

Degree Name

M.S. (Master of Science)

Legacy Department

Department of Electrical Engineering


Thin films; Chemical detectors--Design and construction; Aluminum oxide--Detection


Chemical sensors have been used in many industries from process control, monitoring the amount of gases in industries to environmental protection. Recent work showed that Nanoporous Anodized Aluminum Oxide (AAO) sensors we used to distinguish and discriminate alcohols and volatile organic compounds. It was also demonstrated that the impedance spectrum of these adsorbed analytes showed a unique trend. In this study Nanoporous Organosilicate films have shown promise as sensor substrates in detection of various vapor phase analytes. We evaluated the properties of both hydrophobic and hydrophilic Nanoporous Organosilicate sensor using Impedance Spectroscopy (IS) to obtain the sensor response in time-domain and real and imaginary impedance of the sensor in various vapor phase analytes. This work addresses the use of Nanoporous Organosilicate thin films as a low-cost alternative sensor substrates to Nanoporous Anodized Aluminum Oxide sensors. With this study it also showed that application of Nanoporous Organosilicate thin can be further expanded as sensing devices for both industrial and commercial purposes.


Advisors: Venumadhav Korampally.||Committee members: Zinger Donald; Kocanda Martin; Haji-sheik Michael; Suma Rajashankar.||Includes bibliographical references.||Includes illustrations.


v, 50 pages




Northern Illinois University

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