Rashmi Asalla

Publication Date

2016

Document Type

Dissertation/Thesis

First Advisor

Korampally, Venumadhav

Degree Name

M.S. (Master of Science)

Legacy Department

Department of Electrical Engineering

LCSH

Thin films; Chemical detectors--Design and construction; Aluminum oxide--Detection

Abstract

Chemical sensors have been used in many industries from process control, monitoring the amount of gases in industries to environmental protection. Recent work showed that Nanoporous Anodized Aluminum Oxide (AAO) sensors we used to distinguish and discriminate alcohols and volatile organic compounds. It was also demonstrated that the impedance spectrum of these adsorbed analytes showed a unique trend. In this study Nanoporous Organosilicate films have shown promise as sensor substrates in detection of various vapor phase analytes. We evaluated the properties of both hydrophobic and hydrophilic Nanoporous Organosilicate sensor using Impedance Spectroscopy (IS) to obtain the sensor response in time-domain and real and imaginary impedance of the sensor in various vapor phase analytes. This work addresses the use of Nanoporous Organosilicate thin films as a low-cost alternative sensor substrates to Nanoporous Anodized Aluminum Oxide sensors. With this study it also showed that application of Nanoporous Organosilicate thin can be further expanded as sensing devices for both industrial and commercial purposes.

Comments

Advisors: Venumadhav Korampally.||Committee members: Zinger Donald; Kocanda Martin; Haji-sheik Michael; Suma Rajashankar.||Includes bibliographical references.||Includes illustrations.

Extent

v, 50 pages

Language

eng

Publisher

Northern Illinois University

Rights Statement

In Copyright

Rights Statement 2

NIU theses are protected by copyright. They may be viewed from Huskie Commons for any purpose, but reproduction or distribution in any format is prohibited without the written permission of the authors.

Media Type

Text

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