Publication Date
2004
Document Type
Dissertation/Thesis
Degree Name
M.S. (Master of Science)
Legacy Department
Department of Mechanical Engineering
LCSH
Metals--Pickling--Computer simulation; Semiconductor wafers
Recommended Citation
Hu, Chih-Chieh, "Modeling of chemical mechanical polishing process" (2004). Graduate Research Theses & Dissertations. 3993.
https://huskiecommons.lib.niu.edu/allgraduate-thesesdissertations/3993
Extent
xi, 89 pages
Language
eng
Publisher
Northern Illinois University
Rights Statement
In Copyright
Rights Statement 2
NIU theses are protected by copyright. They may be viewed from Huskie Commons for any purpose, but reproduction or distribution in any format is prohibited without the written permission of the authors.
Media Type
Text
COinS
Comments
Includes bibliographical references (pages [87]-89).