Author

Chih-Chieh Hu

Publication Date

2004

Document Type

Dissertation/Thesis

Degree Name

M.S. (Master of Science)

Legacy Department

Department of Mechanical Engineering

LCSH

Metals--Pickling--Computer simulation; Semiconductor wafers

Comments

Includes bibliographical references (pages [87]-89).

Extent

xi, 89 pages

Language

eng

Publisher

Northern Illinois University

Rights Statement

In Copyright

Rights Statement 2

NIU theses are protected by copyright. They may be viewed from Huskie Commons for any purpose, but reproduction or distribution in any format is prohibited without the written permission of the authors.

Media Type

Text

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