Publication Date
1990
Document Type
Dissertation/Thesis
First Advisor
Newell, Darrell E.
Degree Name
M.S. (Master of Science)
Legacy Department
Department of Electrical Engineering
LCSH
Photolithography; Oscillators; Crystal
Abstract
The quartz crystal is an electro-mechanical device that has for the past several decades been implemented for precise time keeping and frequency control in electrical circuits. When implemented in an electrical circuit, the quartz crystal is referred to as a resonator. The quartz crystal’s frequency and temperature stability cannot be matched dollar for dollar with any other type of resonator. To keep pace with the electronics industry’s drive towards component miniaturization, a process was developed to fabricate miniature quartz resonators. This process utilizes chemical milling and photolithographic processing techniques to construct the quartz resonator. The type of quartz resonator that was chosen to be fabricated was an AT-Strip resonator. The AT designation refers to a wafer taken from the quartz bar at a precise angle, and strip refers to the resonator’s rectangular shape. This type of resonator was chosen due to its temperature stability and relatively high frequency of oscillation.
Recommended Citation
Westberg, Gregg, "Fabrication of miniature quartz resonators utilizing photolithographic techniques" (1990). Graduate Research Theses & Dissertations. 3048.
https://huskiecommons.lib.niu.edu/allgraduate-thesesdissertations/3048
Extent
viii, 78 pages
Language
eng
Publisher
Northern Illinois University
Rights Statement
In Copyright
Rights Statement 2
NIU theses are protected by copyright. They may be viewed from Huskie Commons for any purpose, but reproduction or distribution in any format is prohibited without the written permission of the authors.
Media Type
Text
Comments
Includes bibliographical references (leaf 73)