Publication Date
2004
Document Type
Dissertation/Thesis
Degree Name
M.S. (Master of Science)
Legacy Department
Department of Electrical Engineering
LCSH
Microelectromechanical systems--Design and construction; Piezoelectric devices--Design and construction
Recommended Citation
Ervin, Joseph, "Design and fabrication of a piezoelectric actuated virtually zero dead volume micropump" (2004). Graduate Research Theses & Dissertations. 2082.
https://huskiecommons.lib.niu.edu/allgraduate-thesesdissertations/2082
Extent
vii, 56, [1] pages
Language
eng
Publisher
Northern Illinois University
Rights Statement
In Copyright
Rights Statement 2
NIU theses are protected by copyright. They may be viewed from Huskie Commons for any purpose, but reproduction or distribution in any format is prohibited without the written permission of the authors.
Media Type
Text
COinS
Comments
Includes bibliographical references (page [57]).