Publication Date


Document Type


First Advisor

Zinger, Donald S.

Degree Name

M.S. (Master of Science)

Legacy Department

Department of Electrical Engineering


In this thesis, piezoelectric pressure sensing element circuit has been proposed and designed to drive the IGBT. The idea behind this work is to integrate and develop the IGBT as pressure sensor. By the application of pressure on the sensing element, the output voltage can turn on the IGBT. The relationship between the force applied and generated voltage of the electromechanical model has been analyzed theoretically.The piezo material used for this work is PZT due its best-known properties. The PZT is also modeled in COMSOL, and its output voltage results are compared with the LT SPICE and theoretical calculation for the proof of concept. Some additional work has also been done in this thesis, which will put light on the IGBT integration with capacitive sensing element. Being a topic, that has only seen a small amount of investigation, it provides an excellent scope of work in future for high voltage and industrial applications.


53 pages




Northern Illinois University

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