M.S. (Master of Science)
Department of Electrical Engineering
Ion bombardment; Neutral beams; Magnetoresistance; Thin films
Shaparenko, Roman, "The design and implementation of a neutralized ion beam sputtering system for the deposition of La₀₈̣₁₅Sr₀₁̣₈₅MnO₃ magnetoresistive thin films" (2001). Graduate Research Theses & Dissertations. 5404.
ix, 70 pages
Northern Illinois University
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