Publication Date

1996

Document Type

Dissertation/Thesis

First Advisor

Abdel-Motaleb, Ibrahim Mohamed, 1954-

Degree Name

M.S. (Master of Science)

Department

Department of Electrical Engineering

LCSH

Zinc selenide||Gallium arsenide||Chemical vapor deposition||Crystal growth

Abstract

The objective of the present research is to grow and characterize Zinc- Selenide (ZnSe) material on different substrates, namely Gallium Arsenide (GaAs) and Germanium (Ge), using the Metalorganic Chemical Vapor Deposition (MOCVD) technique. A MOCVD system is built for this purpose. The surface morphology of the grown layers is examined using the Digital Equipment contact mode atomic force microscope (AFM). The carrier concentration-depth profiles are obtained for ZnSe/Ge heterostructure using the Bio-Rad electrochemical CV profiler. The surface morphology of the ZnSe epilayer grown on [111 ] GaAs substrates was found to be very rough, where the grown material is believed to be polycrystalline. The quality of the ZnSe surface, however, was improved when [100] GaAs substrates were used. The surface was improved even further when the surface of the GaAs was saturated with zinc, before growing the ZnSe layer. Expecting to achieve the same results with Ge substrates, the surfaces of one sample was saturated with zinc and another sample with selenide. The best surface morphology was found to be the sample whose surface was first saturated with selenide. In the carrier concentration-depth profile, doping changes abruptly from n to p at 1.5 pm. This indicates that the ZnSe layer is 1.5 pm thick since the ZnSe is expected to be n-type and the Ge is a p-type material. This means the growth rate of ZnSe on Ge is about 500?A/min, if 1 seem flow rate for Zn and Se are used with the substrate temperature held at 300?C.

Comments

Includes bibliographical references (pages [138]-153)

Extent

xiv, 174 pages

Language

eng

Publisher

Northern Illinois University

Rights Statement

In Copyright

Rights Statement 2

NIU theses are protected by copyright. They may be viewed from Huskie Commons for any purpose, but reproduction or distribution in any format is prohibited without the written permission of the authors.

Media Type

Text

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