Publication Date

1983

Document Type

Dissertation/Thesis

First Advisor

Shaffer, John C., 1938-2017

Degree Name

M.S. (Master of Science)

Legacy Department

Department of Physics

LCSH

Thin films--Optical properties; Ellipsometry; Molybdenum compounds

Abstract

An automatic ellipsometer was used to measure the optical properties of black molybdenum thin films, a combination of molybdenum and molybdenum dioxide. These films were produced by chemical vapor deposition and are a suspension, or cermet, of Mo in an MoO₂ matrix. Calibration of the ellipsometer was done by comparing the results from a physical vapor deposited thin gold film to previously obtained values. Fifteen black molybdenum samples were measured which varied by two parameters: the temperature used for deposition and the amount of reactant hydrogen gas present during formation. Using these two parameters it is shown that spectrally selective surfaces can be produced which optimize the optical properties of a sample. The complex index of refraction N, the reflectance R and the absorptance A are discussed.

Comments

Bibliography: pages [50]-51.

Extent

ix, 51 pages

Language

eng

Publisher

Northern Illinois University

Rights Statement

In Copyright

Rights Statement 2

NIU theses are protected by copyright. They may be viewed from Huskie Commons for any purpose, but reproduction or distribution in any format is prohibited without the written permission of the authors.

Media Type

Text

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