Author

Joseph Ervin

Publication Date

2004

Document Type

Dissertation/Thesis

Degree Name

M.S. (Master of Science)

Legacy Department

Department of Electrical Engineering

LCSH

Microelectromechanical systems--Design and construction; Piezoelectric devices--Design and construction

Comments

Includes bibliographical references (page [57]).

Extent

vii, 56, [1] pages

Language

eng

Publisher

Northern Illinois University

Rights Statement

In Copyright

Rights Statement 2

NIU theses are protected by copyright. They may be viewed from Huskie Commons for any purpose, but reproduction or distribution in any format is prohibited without the written permission of the authors.

Media Type

Text

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